Alternate layer deposition method for the deposition of c-axis oriented hexagonal barium ferrite thin films

Journal of Magnetism and Magnetic Materials

Volumn 177-181, Issue PART 1, 1998, Pages 241-242

  Hoshi, Y ^a   Shinozaki, H ^a   Shimizu, H ^b   Kato, K ^b   Kaneko, F ^b  

^a TOKYO POLYTECHNIC UNIVERSITY   (Japan)

^b NIIGATA UNIVERSITY   (Japan)

Author keywords

Ferrites hexagonal; Sputtering facing targets; Thin film synthesis; Thin films sputter

Indexed keywords

CRYSTAL ORIENTATION; FERRITES; SPUTTER DEPOSITION; THERMAL EFFECTS; THIN FILMS;

BARIUM FERRITE; HEXAGONAL FERRITES; PERIODIC LAYER DEPOSITION;

MAGNETIC FILMS;

EID: 0031706205     PISSN: 03048853     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-8853(97)00981-5     Document Type: Article

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