Through-wafer electrical interconnects by sidewall photolithographic patterning

Conference Record - IEEE Instrumentation and Measurement Technology Conference

Volumn 2, Issue , 1998, Pages 1402-1405

  Liu, Chang ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONTACTS; ELECTROMAGNETIC WAVE DIFFRACTION; LIGHT SCATTERING; MIRRORS; SILICON WAFERS; SURFACE MEASUREMENT;

SIDEWALL PHOTOLITHOGRAPHIC PATTERNING; THROUGH WAFER ELECTRICAL INTERCONNECTS;

PHOTOLITHOGRAPHY;

EID: 0031704062     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)