3D-structuring of photosensitive glasses

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 207-210

  Feindt, K ^a   Harnisch, A ^a   Zoppig, V ^a   Huelsenberg, D ^a   Kallenbach, E ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM; ETCHING; FUSED SILICA; LIGHT SENSITIVE MATERIALS; MASKS; PHOTOSENSITIVITY; ULTRAVIOLET RADIATION;

PHOTOSENSITIVE GLASSES;

OPTICAL GLASS;

EID: 0031703288     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)