Correlation between in situ Optical Emission Spectroscopy in a reactive O2/Ar rf magnetron sputtering discharge and PZT thin film composition

Materials Research Society Symposium - Proceedings

Volumn 493, Issue , 1998, Pages 333-338

  Ayguavives, F ^a   Aubert, P ^a   Ea Kim, B ^a   Agius, B ^a  

^a UNIVERSITÉ PARIS SACLAY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; CORRELATION METHODS; EMISSION SPECTROSCOPY; MAGNETRON SPUTTERING; SPECTRUM ANALYSIS; THIN FILMS; TITANIUM COMPOUNDS;

OPTICAL EMISSION SPECTROSCOPY;

FERROELECTRIC MATERIALS;

EID: 0031701707     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)