Outer-rotor polysilicon wobble micromotors

Sensors and Actuators, A: Physical

Volumn 64, Issue 3, 1998, Pages 265-271

  Deng, Keren ^a,b,c   Mehregany, Mehran ^a  

^a Case Western Reserve University   (United States)

^b MEMSTEK Products LLC   (United States)

^c MEMS Division   (United States)

Author keywords

Outer rotor concept; Polysilicon; Surface micromachining; Wobble micromotors

Indexed keywords

BEARINGS (MACHINE PARTS); ELECTRIC INSULATING MATERIALS; MASKS; MICROMACHINING; POLYCRYSTALS; ROTORS (WINDINGS); SILICON; STATORS; TORQUE MEASUREMENT;

OUTER ROTOR POLYSILICON WOBBLE MICROMETERS;

ELECTRIC MOTORS;

EID: 0031700774     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01613-0     Document Type: Article

References (8)

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