Lithography offers market for UV solid-state lasers

Laser Focus World

Volumn 34, Issue 1, 1998, Pages 113-134

  Mead, Roy D ^a   Miyake, Charles I ^a  

^a ACULIGHT CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EXCIMER LASERS; OPTICAL FREQUENCY CONVERSION; PARAMETRIC OSCILLATORS; PHOTOLITHOGRAPHY; PHOTORESISTS; SOLID STATE LASERS; ULTRAVIOLET RADIATION;

CESIUM LITHIUM BORATE; LITHIUM TRIBORATE; NONLINEAR OPTICAL WAVELENGTH; OPTICAL PARAMETRIC OSCILLATOR; PERIODICALLY POLED LITHIUM NIOBATE;

NEODYMIUM LASERS;

EID: 0031699523     PISSN: 10438092     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (3)

1. R. D. Mead, C. E. Hamilton, and D. D. Lowenthal, "Solid-state lasers for 193-nm lithography," in Optical Microlithography X, Gene E. Fuller, ed., Proc. SPIE 3051, p. 882.
2. Y. K. Yap et al., "High-power all-solid-state ultraviolet laser by CLBO crystal," in Advanced Solid-State Lasers, Technical Digest (OSA,Washington, DC, 1997), p 152.
3. W-B. Yan et al., Conference on Lasers and Electro-Optics, paper CFF5, OSA Technical Digest Series 17, 485 (1997).