Simulation of structural characteristics of ceramic coating film based on modeling of sputtering process

JSME International Journal, Series A: Solid Mechanics and Material Engineering

Volumn 41, Issue 1, 1998, Pages 25-30

  Hoshide, Toshihiko ^a   Iizuka, Takashi ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Ceramic Coating; Dynamics of Rigid Spheres; Microhardness; Modeling; Monte Carlo Simulation; Numerical Analysis; Sputtering

Indexed keywords

AMORPHOUS FILMS; COMPUTER SIMULATION; HARDNESS; MATHEMATICAL MODELS; MONTE CARLO METHODS; PARTICLES (PARTICULATE MATTER); SPUTTER DEPOSITION; STRUCTURE (COMPOSITION); VOLUME FRACTION;

CERAMIC FILMS;

CERAMIC COATINGS;

EID: 0031695939     PISSN: 13447912     EISSN: None     Source Type: Journal    
DOI: 10.1299/jsmea.41.25     Document Type: Article

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