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Volumn 41-42, Issue , 1998, Pages 241-244

Lifetime enhancement of a multicusp ion source for lithography

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC DISCHARGES; ION BEAM LITHOGRAPHY; IONS;

EID: 0031683277     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(98)00055-0     Document Type: Article
Times cited : (4)

References (8)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.