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Volumn 41-42, Issue , 1998, Pages 241-244
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Lifetime enhancement of a multicusp ion source for lithography
a,b
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTER SIMULATION;
ELECTRIC DISCHARGES;
ION BEAM LITHOGRAPHY;
IONS;
LIFETIME ENHANCEMENT;
ION SOURCES;
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EID: 0031683277
PISSN: 01679317
EISSN: None
Source Type: Journal
DOI: 10.1016/S0167-9317(98)00055-0 Document Type: Article |
Times cited : (4)
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References (8)
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