Fabrication of slot antenna coupled warm carrier detectors for millimeter wave radiation

Microelectronic Engineering

Volumn 41-42, Issue , 1998, Pages 445-448

  Yasuoka, Yoshizumi ^a   Shimizu, Takashi ^a   Gamo, Kenji ^b  

^a NATIONAL DEFENSE ACADEMY   (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS; ETCHING; FABRICATION; LITHOGRAPHY; MILLIMETER WAVES; THIN FILMS;

POINT CONTACT ANTENNA COUPLED DEVICES;

SLOT ANTENNAS;

EID: 0031681973     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(98)00103-8     Document Type: Article

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