Reliability study of titanium silicide lines using micro-Raman spectroscopy and emission microscopy

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 1998, Pages 124-128

  De Wolf, I ^a   Howard, D J ^a   Rasras, M ^a   Lauwers, A ^a   Maex, K ^a   Groeseneken, G ^a   Maes, H E ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLOGRAPHY; ELECTRIC RESISTANCE; EMISSION SPECTROSCOPY; RAMAN SPECTROSCOPY; RELIABILITY;

TITANIUM DISILICIDE;

TITANIUM COMPOUNDS;

EID: 0031680838     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)