MEMS electrostatic particle transportation system

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 121-126

  Desai, A ^a   Lee, S W ^a   Tai, Y C ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; COMPUTER SIMULATION; ELECTRIC INSULATING MATERIALS; ELECTRODES; ELECTROSTATIC DEVICES; FINITE ELEMENT METHOD; PARTICLE SIZE ANALYSIS; PARTICLES (PARTICULATE MATTER);

ELECTROSTATIC PARTICLE TRANSPORTATION SYSTEM; THREE PHASE ELECTRODE ARRAYS;

MICROELECTROMECHANICAL DEVICES;

EID: 0031677499     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)