MEMS-first fabrication process for integrating CMOS circuits with polysilicon microstructures

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 257-262

  Gianchandani, Y B ^a   Kim, H ^a   Shinn, M ^a   Ha, B ^a   Lee, B ^a   Najafi, K ^a   Song, C ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; AMPLIFIERS (ELECTRONIC); CAPACITORS; CMOS INTEGRATED CIRCUITS; CRYSTAL MICROSTRUCTURE; GYROSCOPES; INTERFACES (MATERIALS); LITHOGRAPHY; SILICON WAFERS; TRANSISTORS;

POLYSILICON MICROMECHANICAL STRUCTURES; SWITCHED CAPACITOR CHARGE AMPLIFIERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0031676414     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)