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Volumn 183, Issue 1-2, 1998, Pages 81-88
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Development of finite element computer program for dislocation density analysis of bulk semiconductor single crystals during Czochralski growth
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTER SIMULATION;
CRYSTAL GROWTH FROM MELT;
DISLOCATIONS (CRYSTALS);
FINITE ELEMENT METHOD;
INTERFACES (MATERIALS);
INTERPOLATION;
MATHEMATICAL MODELS;
SEMICONDUCTING GALLIUM ARSENIDE;
SEMICONDUCTING INDIUM COMPOUNDS;
SEMICONDUCTING SILICON;
DISLOCATION KINETIC MODELS;
HAASEN SUMINO MODELS;
SEMICONDUCTOR SINGLE CRYSTALS;
SINGLE CRYSTALS;
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EID: 0031674884
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(97)00388-6 Document Type: Article |
Times cited : (46)
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References (20)
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