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Volumn 183, Issue 1-2, 1998, Pages 81-88

Development of finite element computer program for dislocation density analysis of bulk semiconductor single crystals during Czochralski growth

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CRYSTAL GROWTH FROM MELT; DISLOCATIONS (CRYSTALS); FINITE ELEMENT METHOD; INTERFACES (MATERIALS); INTERPOLATION; MATHEMATICAL MODELS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTING SILICON;

EID: 0031674884     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(97)00388-6     Document Type: Article
Times cited : (46)

References (20)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.