Improvement of effective charges in oxynitride prepared by liquid phase deposition on silicon

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 37, Issue 1 PART A/B, 1998, Pages

  Lee, Ming Kwei ^a   Lin, Chung Hsing ^a   Lei, Bo Hsiung ^a   Yang, Chi Da ^a  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

Author keywords

Effective charges; H2SiF6; LPD SiON; NH4OH

Indexed keywords

AMMONIA HYDROXIDE AQUA; BORIC ACID; EFFECTIVE CHARGES; HYDROSILICOFLUORIC ACID; OXYNITRIDE FILM;

ANNEALING; ATOMS; ELECTRIC INSULATING COATINGS; INTERFACES (MATERIALS); IONS; NITRIDES; NITROGEN; SILICON; SOLUTIONS;

FILMS;

EID: 0031673848     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.l53     Document Type: Article

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