Optimization and fabrication of a dual thermopile sensor based on the BEM

Sensors and Actuators, A: Physical

Volumn 64, Issue 2, 1998, Pages 179-184

  Lee, Jun Bae ^a   Kim, In Sik ^a   Sim, Young Cho ^a   Kim, Tae Yoon ^a  

^a LG   (South Korea)

Author keywords

Boundary element method (BEM); Dual sensors; Genetic algorithm; Optimization; Thermopiles

Indexed keywords

BOUNDARY ELEMENT METHOD; COMPUTER SIMULATION; FABRICATION; FINITE ELEMENT METHOD; GENETIC ALGORITHMS; OPTIMIZATION; TEMPERATURE; THERMOPILES;

DUAL SENSORS; THERMOPILE SENSOR;

SENSORS;

EID: 0031672227     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)80012-5     Document Type: Article

References (16)

1. G.R. Lahiji and K.D. Wise, A batch-fabricated silicon thermopile infrared detector, IEEE Trans. Electron Devices, ED-29 (1982) 14-22.
2. G.D. Nieveld, Thermopiles fabricated using silicon planar technology, Sensors and Actuators, 3 (1983) 179-183.
3. A.W. van Herwaarden and P.M. Sarro, Thermal sensors based on the Seebeck effect. Sensors and Actuators, 10 (1986) 321-346.
4. A.W. van Herwaarden, D.C. van Duyn, B.W. van Oudheusden and P.M. Sarro, Integrated thermopile sensors, Sensors and Actuators, A21-A23( 1989) 621-630.
5. F. Völklein, A. Wiegand and V. Baier, High sensitivity radiation thermopiles made of Bi-Sb-Te films, Sensors and Actuators A, 29 (1991) 87-91.
6. T. Elbel, Miniaturized thermoelectric radiation sensors, Sensors Mater., 3 (1991) 97-109.
7. T. Elbel, R. Leggenhager and H. Baltes, Model of thermoelectric radiation sensors made by CMOS and micromachining, Sensors and Actuators A, 35 (1992) 101-106.
8. R. Lenggenhager, H. Baltes and T. Elbel, Thermoelectric infrared sensors in CMOS technology, Sensors and Actuators A, 37-38 (1993) 216-220.
9. S.B. Crary, Thermal management of integrated microsensors, Sensors and Actuators, 12 (1987) 303-312.
10. S.B. Crary, The finite-element method for microsensors, J. Electrochem. Soc., 134 (1987) 2937-2940.
11. F, Völklein and H. Baltes, Optimization tool for the performance parameters of thermoelectric microsensors, Sensors and Actuators A, 36(1993) 65-71.
12. T. Elbel, S. Poser and H. Fischer, Thermoelectric radiation microsensors, Sensors and Actuators A, 41-42 (1994) 493-496.
13. A.U. Dillner, Thermal modeling of multilayer membranes for sensor applications, Sensors and Actuators A, 41-42 (1994) 260-267.
14. C.A. Brebbia, Boundary Element Method for Engineers, Pentech Press, London, 1980.
15. F. Hartmann, Introduction to Boundary Elements, Springer, Berlin, 1989.
16. D.E. Goldberg, Genetic Algorithm in Search, optimization and Machine Learning, Addison-Wesley, 1989.