Ideal adiabatic structure LiTaO3 pyroelectric microsensor fabricated by sandblasting technique

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 296-300

  Matsushima, Tomoaki ^a   Yagyu, Hiroyuki ^a   Matsumura, Yoshihiro ^a   Ikari, Motoo ^a   Horiuchi, Kazuhiro ^a  

^a PANASONIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE ELEMENT METHOD; LITHIUM COMPOUNDS; PYROELECTRICITY; SENSITIVITY ANALYSIS; STRESS CONCENTRATION; TEMPERATURE DISTRIBUTION;

PYROELECTRIC SENSORS; SANDBLASTING METHODS;

SENSORS;

EID: 0031654766     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)