Low-loss optical waveguide on standard SOI/SIMOX substrate

Optics Communications

Volumn 146, Issue 1-6, 1998, Pages 31-33

  Layadi, A ^a   Vonsovici, A ^a   Orobtchouk, R ^a   Pascal, D ^a   Koster, A ^a  

^a CNRS   (France)

Author keywords

Propagation loss; SIMOX; Surface passivation; Waveguide

Indexed keywords

INTERFACES (MATERIALS); LIGHT MEASUREMENT; LIGHT TRANSMISSION; PASSIVATION; SEMICONDUCTING FILMS; SILICON ON INSULATOR TECHNOLOGY; SUBSTRATES; THIN FILMS;

PROPAGATION LOSS MEASUREMENT; SEPARATION BY IMPLANTATION OF OXYGEN (SIMOX);

OPTICAL WAVEGUIDES;

EID: 0031654412     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0030-4018(97)00600-7     Document Type: Article

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