Mesoscale thermal infrared sources

Microelectronic Engineering

Volumn 41-42, Issue , 1998, Pages 579-582

  Giraud, S O C ^a   Hasko, D G ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTRIC WIRE; ELECTRON BEAMS; HEAT RADIATION; LITHOGRAPHY; NANOTECHNOLOGY; SILICON WAFERS; TUNGSTEN;

MESOSCALE THERMAL INFRARED SOURCES;

INFRARED RADIATION;

EID: 0031654077     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(98)00136-1     Document Type: Article

References (5)

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3. C. G. Smith, H. Ahmed and M. N. Wybourne, J. Vac. Sci. Technol. B5 (1987) 314.
4. G. Kirchhoff, Monresberichte der Academie der Wissenschaften zu Berlin, Verlag, Leipzig, 1859.
5. R. Guenther, Modern optic, John Wiley, 1990.