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Volumn 501, Issue , 1998, Pages 149-160
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Surface and bulk properties of boride/nitride nanoscale films
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
FILM PREPARATION;
MAGNETRON SPUTTERING;
SCANNING ELECTRON MICROSCOPY;
SURFACE PROPERTIES;
TITANIUM NITRIDE;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY DIFFRACTION ANALYSIS;
X RAY PHOTOELECTRON SPECTROSCOPY;
VICKERS INDENTOR;
NANOSTRUCTURED MATERIALS;
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EID: 0031654018
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (3)
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References (16)
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