Glow Discharge Optical Emission Spectroscopy-The Fundamental Principles

High Temperature Materials and Processes

Volumn 17, Issue 1-2, 1998, Pages 97-116

  Wagatsuma, Kazuald ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; EMISSION SPECTROSCOPY; GLOW DISCHARGES; IONIZATION; LIGHT EMISSION; PLASMAS; SPUTTERING;

CATHODE SPUTTERING; OPTICAL EMISSION SPECTROSCOPY;

GAS DISCHARGE TUBES;

EID: 0031653025     PISSN: 03346455     EISSN: None     Source Type: Journal    
DOI: 10.1515/HTMP.1998.17.1-2.97     Document Type: Article

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