Comparative study of leakage mechanism of Co and Ni salicide processes

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 1998, Pages 363-369

  Goto, Ken ichi ^a   Watanabe, Junichi ^a   Sukegawa, Takae ^a   Fushida, Atsuo ^a   Sakuma, Takashi ^a   Sugii, Toshihiro ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; COBALT; LEAKAGE CURRENTS; NICKEL; STATISTICAL METHODS;

SALICIDE PROCESSES;

MICROELECTRONICS;

EID: 0031652542     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)