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Volumn , Issue , 1998, Pages 153-168

Deposition of cubic boron nitride by magnetron sputtering: Process diagnostics and film characterization

Author keywords

[No Author keywords available]

Indexed keywords

CUBIC BORON NITRIDE; FILM GROWTH; FLUORESCENCE; MAGNETRON SPUTTERING; MEASUREMENT ERRORS; NUCLEATION; SPUTTER DEPOSITION; THIN FILMS;

EID: 0031651886     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (4)

References (29)
  • Reference 정보가 존재하지 않습니다.

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.