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Volumn , Issue , 1998, Pages 153-168
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Deposition of cubic boron nitride by magnetron sputtering: Process diagnostics and film characterization
a
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Author keywords
[No Author keywords available]
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Indexed keywords
CUBIC BORON NITRIDE;
FILM GROWTH;
FLUORESCENCE;
MAGNETRON SPUTTERING;
MEASUREMENT ERRORS;
NUCLEATION;
SPUTTER DEPOSITION;
THIN FILMS;
LANGMUIR PROBES;
INORGANIC COATINGS;
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EID: 0031651886
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (4)
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References (29)
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