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Volumn 493, Issue , 1998, Pages 137-142
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Hillock growth at the surface of Pt/TiN electrodes for ferroelectric capacitors during annealing in N2/O2 ambient
a
a
HITACHI LTD
(Japan)
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
FILM GROWTH;
MAGNETIC DOMAINS;
PLASTIC DEFORMATION;
STRESSES;
SURFACE PHENOMENA;
THERMAL EFFECTS;
THIN FILMS;
HILLOCKS;
PLATINUM;
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EID: 0031651421
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (6)
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References (7)
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