Evanescent-field-controlled nano-pattern transfer and micro-manipulation

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 488-493

  Ono, Takahito ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRON BEAMS; MEMBRANES; METALLIC FILMS; PHOTORESISTS; PRINTED CIRCUIT MANUFACTURE; SILICON; SUBSTRATES;

EVANESCENT FIELDS; NANOPATTERN TRANSFER;

MASKS;

EID: 0031651047     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)