Anisotropy and selectivity control of TMAH

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 229-233

  Tabata, O ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; COMPOSITION EFFECTS; CRYSTAL ORIENTATION; ETCHING; HIGH TEMPERATURE EFFECTS; IONS; POTASSIUM; SILICA; SILICON;

WAGON WHEEL PATTERNS;

MICROELECTROMECHANICAL DEVICES;

EID: 0031650645     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)