Tunable acoustic absorbing system using a deep hole array

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 655-660

  Konishi, Satoshi ^a   Yoda, Mitsuhiro ^a   Hosaka, Naohiro ^a   Sugiyama, Susumu ^a   Akishita, Sadao ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

SOUND INSULATION; TUNING; X RAY LITHOGRAPHY;

ACOUSTIC ABSORBING SYSTEMS; DEEP HOLE ARRAY; HELMHOLTZ RESONATORS;

RESONATORS;

EID: 0031650208     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)