A spindleless instrument for the roundness measurement of precision spheres

Precision Engineering

Volumn 22, Issue 1, 1998, Pages 37-42

  Gleason, E ^a   Schwenke, H ^b  

^a Bal Tec Div   (United States)

^b PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Capacitive sensor; Metrology; Roundness; Spheres; Temperature stability; Three point method

Indexed keywords

CAPACITANCE MEASUREMENT; DESIGN; MEASUREMENT ERRORS; SPHERES; STABILITY; TRANSDUCERS;

ROUNDNESS MEASUREMENT;

SPATIAL VARIABLES MEASUREMENT;

EID: 0031649281     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0141-6359(97)00089-5     Document Type: Article

References (5)

1. Chetwynd, D. G. and Siddall, G. J. "Improving the accuracy of roundness measurement," J Phys E: Sci Instrum, 1976, 9, 537-544
2. Moore, D. "Design considerations in multiprobe roundness measurement," J Physics E: Sci Instrum, 1989, 22, 339-343
3. Whitehouse, D. J. "Some theoretical aspects in error separation techniques in surface metrology," J Phys E: Sci Instrum, 1976, 9, 531-536
4. Barth, U. "Kombinierte Zweipunkt-Dreipunkt-Messung bei gleichzeitigem Bestimmen der Kreisformabweichung," Feingerätemeßtechnik, 1984, 33
5. Shinno, Mitsui and Tatsue. "A new model for evaluating error motion of ultraprecision spindles," Ann CIRP, 1978, 27, 371-375