The interface structure of polyimide guides etched by ion irradiation

Optical Materials

Volumn 9, Issue 1-4, 1998, Pages 245-250

  Moliton, Jean Pierre ^a   Mazière, Bruno ^a   Devilder, Caroline ^a   Trigaud, Thierry ^a  

^a UNIVERSITY OF LIMOGES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONIC STRUCTURE; INTERFACES (MATERIALS); ION BOMBARDMENT; LIGHT REFRACTION; POLYIMIDES; REACTIVE ION ETCHING;

ION ENERGY; ION IRRADIATION; POLYIMIDE GUIDES;

OPTICAL WAVEGUIDES;

EID: 0031648611     PISSN: 09253467     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-3467(97)00096-7     Document Type: Article

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