Technology and applications of micromachined membrane deformable mirrors

LEOS Summer Topical Meeting

Volumn , Issue , 1998, Pages 97-98

  Vdovin, G ^a   Sarro, P M ^a   Middelhoek, S ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; ACTUATORS; ADAPTIVE OPTICS; ELECTROSTATIC DEVICES; IMAGING SYSTEMS; LASER OPTICS; MICROMACHINING; OPTICAL MICROSCOPY; OPTIMIZATION; POLYNOMIALS; REFLECTIVE COATINGS; SCANNING;

ELECTROSTATIC ACTUATORS; MICROMACHINED MEMBRANE DEFORMABLE MIRRORS (MMDM);

MIRRORS;

EID: 0031646052     PISSN: 10994742     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)