Stress evolution during growth of sputtered Ni/Cu multilayers

Materials Research Society Symposium - Proceedings

Volumn 528, Issue , 1998, Pages 161-168

  Ramaswamy, Vidya ^a   Clemens, Bruce M ^a   Nix, William D ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; CRYSTAL DEFECTS; CRYSTAL ORIENTATION; EPITAXIAL GROWTH; MATHEMATICAL MODELS; NICKEL; SPUTTERING; STRESS RELAXATION; TEXTURES;

MATHEWS-BLAKESLEE RELAXATION PROCESS;

METALLIC SUPERLATTICES;

EID: 0031645927     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-528-161     Document Type: Conference Paper

References (6)