Thermal cycling fatigue in aluminum-alloy thin films on silicon substrate

Materials Research Society Symposium - Proceedings

Volumn 505, Issue , 1998, Pages 319-324

  Koike, J ^a   Utsunomiya, S ^a   Maruyama, K ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM ALLOYS; CRYSTAL LATTICES; DELAMINATION; DISLOCATIONS (CRYSTALS); FATIGUE OF MATERIALS; GRAIN BOUNDARIES; RESIDUAL STRESSES; SILICON WAFERS; THERMAL CYCLING; THIN FILMS;

RESIDUAL STRESS MEASUREMENT;

METALLIC FILMS;

EID: 0031645083     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (23)