Laser chemical processing for three-dimensional microstructures

Conference on Lasers and Electro-Optics Europe - Technical Digest

Volumn , Issue , 1998, Pages 509-

  Stuke, Michael ^a  

^a MAX PLANCK INSTITUTE FOR BIOPHYSICAL CHEMISTRY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EXCIMER LASERS; LASER ABLATION; LASER APPLICATIONS; LIGHT; THREE DIMENSIONAL;

LASER CHEMICAL PROCESSING; LASER FABRICATION; THREE DIMENSIONAL MICROSTRUCTURE;

LASER CHEMISTRY;

EID: 0031644660     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/cleo.1998.676559     Document Type: Conference Paper

References (2)