Asymmetric plasma potential fluctuation in an inductive plasma source

IEEE International Conference on Plasma Science

Volumn , Issue , 1998, Pages 233-

  Lho, T ^a   Hershkowitz, N ^a   Kim, G H ^a   Miller, J ^a   Steer, W ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC IMPEDANCE; ELECTROSTATICS;

PLASMA POTENTIAL;

PLASMA SOURCES;

EID: 0031644355     PISSN: 07309244     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)