Moving adaptive unstructured 3-D meshes in semiconductor process modeling applications

VLSI Design

Volumn 6, Issue 1-4, 1998, Pages 373-378

  Kuprat, Andrew ^a,b   George, Denise ^a   Linnebur, Eldon ^a   Trease, Harold ^a   Smith, R Kent ^a,c,d,e  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c Institut fuer Theoritische Physik   (Germany)

^d DUKE UNIVERSITY   (United States)

^e Lucent Bell Labs   (United States)

Author keywords

Adaptive mesh refinement; Adaptive mesh smoothing; Mesh reconnection; Moving grids; Moving surfaces; Multimaterial grids; Unstructured grids

Indexed keywords

ADAPTIVE SYSTEMS; COMPUTER SIMULATION; COMPUTER SOFTWARE; DOPING (ADDITIVES); MATHEMATICAL MODELS; OPTIMIZATION;

ADAPTIVE MESH REFINEMENT;

SEMICONDUCTOR DEVICES;

EID: 0031644243     PISSN: 1065514X     EISSN: None     Source Type: Journal    
DOI: 10.1155/1998/15828     Document Type: Article

References (5)

1. D.C. George, LaGriT User's Manual. http:// www.t12.lanl.gov/̃lagrit.
2. H.E. Trease, "Three-Dimensional Free Lagrangian Hydrodynamics," Proc. of the first Free-Lagrange Conf., Lecture Notes in Physics, Springer-Verlag. Vol. 238, 1985, pp. 145-157.
3. R..E. Bank and R.K. Smith, "Mesh smoothing using a posteriori error estimates," SIAM J. Num. Anal. Vol. 34, 1997, pp. 979-997.
4. N. Carlson and K. Miller, "Gradient weighted moving finite elements in two dimensions," Finite Elements Theory and Application, D.L. Dwoyer, M.Y. Hussaini and R.G. Voight, editors, Springer Verlag, 1988, pp. 151-164.
5. R.E. Bank and R.K. Smith, "Some a posteriori error estimates based on hierarchical bases," SIAM J. Numerical Analysis, Vol. 30, 1993, pp. 921-935.