Micro-Raman study of mechanical stress in polycrystalline silicon bridges

Materials Research Society Symposium - Proceedings

Volumn 505, Issue , 1998, Pages 495-500

  Talaat, H ^a   Negm, S ^a   Schaffer, H ^a   Kaltsas, G ^a   Nassiopoulou, A G ^a  

^a AIN SHAMS UNIVERSITY   (Egypt)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; MEMBRANES; POLYCRYSTALLINE MATERIALS; RAMAN SPECTROSCOPY; RESIDUAL STRESSES; STRESS ANALYSIS; STRESS CONCENTRATION;

MICRO-RAMAN SPECTROSCOPY; POLYCRYSTALLINE SILICON BRIDGES;

SILICON WAFERS;

EID: 0031643238     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)