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Volumn 525, Issue , 1998, Pages 109-114
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Model based temperature control in RTP yielding ±0.1 °C accuracy on a 1000 °C, 2 second, 100 °C/s spike anneal
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
DIFFERENTIAL EQUATIONS;
FEEDBACK CONTROL;
MATHEMATICAL MODELS;
NONLINEAR EQUATIONS;
TEMPERATURE CONTROL;
RAPID THERMAL PROCESSING (RTP);
SEMICONDUCTOR DEVICE MANUFACTURE;
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EID: 0031641456
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-525-109 Document Type: Conference Paper |
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Times cited : (5)
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References (5)
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