Anomalous geometry dependence of source/drain resistance in narrow-width MOSFETs

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 1998, Pages 77-82

  Scholten, A J ^a   Klaassen, D B M ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC RESISTANCE; INTEGRATED CIRCUIT LAYOUT; SEMICONDUCTOR DEVICE MODELS;

SOURCE/DRAIN RESISTANCE;

MOSFET DEVICES;

EID: 0031640908     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)