Aging effects on the durability of tantalum nitride films

Materials Research Society Symposium - Proceedings

Volumn 505, Issue , 1998, Pages 173-178

  Moody, N R ^a   Medlin, D ^a   Boehme, D ^a   Norwood, D ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AGING OF MATERIALS; ANNEALING; COMPRESSIVE STRENGTH; RESIDUAL STRESSES; RESISTORS; SPUTTER DEPOSITION; STRESS ANALYSIS; SUBSTRATES; TANTALUM COMPOUNDS; THERMAL EFFECTS; X RAY DIFFRACTION ANALYSIS;

NANOINDENTATION TESTING; NANOSCRATCH TESTING; TANTALUM NITRIDE;

THIN FILM DEVICES;

EID: 0031640637     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)