Measurement of lithographical proximity effects on matching of bipolar transistors

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 1998, Pages 7-12

  Tuinhout, H P ^a   Peters, W C M ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENT MEASUREMENT; ELECTRIC POTENTIAL; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DEVICE TESTING; SEMICONDUCTOR JUNCTIONS;

BIPOLAR JUNCTION TRANSISTORS (BJT); LITHOGRAPHICAL PROXIMITY EFFECTS;

BIPOLAR TRANSISTORS;

EID: 0031640550     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)