Wafer level defect density distribution using checkerboard test structures

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 1998, Pages 101-106

  Hess, Christopher ^a   Weiland, Larg H ^a  

^a UNIVERSITY OF KARLSRUHE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; INTEGRATED CIRCUIT MANUFACTURE; INTEGRATED CIRCUIT TESTING; PROCESS CONTROL;

CHECKERBOARD TEST STRUCTURES; MICRO DENSITY DISTRIBUTION (MDD); WAFER LEVEL DEFECT DENSITY DISTRIBUTION;

SILICON WAFERS;

EID: 0031639082     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)