Single source CVD of LiAlO2

Materials Research Society Symposium - Proceedings

Volumn 495, Issue , 1998, Pages 69-73

  Koh, Wonyong ^a   Ku, Su Jin ^a   Kim, Yunsoo ^a  

^a Korea Research Institute of Chemical Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CHEMICAL VAPOR DEPOSITION; CRYSTALLIZATION; LITHIUM COMPOUNDS; ORGANOMETALLICS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; STOICHIOMETRY; X RAY PHOTOELECTRON SPECTROSCOPY;

DEPTH PROFILE ANALYSIS; ELASTIC RECOIL DETECTION;

AMORPHOUS FILMS;

EID: 0031637945     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)