Grain orientation mapping of passivated aluminum interconnect lines with X-ray micro-diffraction

Materials Research Society Symposium - Proceedings

Volumn 524, Issue , 1998, Pages 55-58

  MacDowell, A A ^a   Chang, C H ^a   Padmore, HA ^a   Patel, J R ^a   Thompson, A C ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; ELECTROMIGRATION; FOCUSING; MIRRORS; PHOTONS; STRAIN MEASUREMENT;

LAUE IMAGING; X RAY MICRODIFFRACTION ANALYSIS;

X RAY CRYSTALLOGRAPHY;

EID: 0031635064     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-524-55     Document Type: Conference Paper

References (6)