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Volumn 208 /209, Issue 1 /4,1/2, 1998, Pages 279-292

Measurement of thermal properties of thin dielectric films and anisotropic solids by AC hot-strip method

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; DEPOSITION; DIFFUSION; ELECTRIC FIELD EFFECTS; SPECIFIC HEAT OF SOLIDS; SPUTTERING; TEMPERATURE; THERMAL CONDUCTIVITY; THERMAL VARIABLES MEASUREMENT; THERMODYNAMIC PROPERTIES; THIN FILMS;

EID: 0031634290     PISSN: 00150193     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1080/00150199808014881     Document Type: Article
Times cited : (6)

References (4)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.