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Volumn 208 /209, Issue 1 /4,1/2, 1998, Pages 279-292
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Measurement of thermal properties of thin dielectric films and anisotropic solids by AC hot-strip method
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Author keywords
[No Author keywords available]
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Indexed keywords
ANISOTROPY;
DEPOSITION;
DIFFUSION;
ELECTRIC FIELD EFFECTS;
SPECIFIC HEAT OF SOLIDS;
SPUTTERING;
TEMPERATURE;
THERMAL CONDUCTIVITY;
THERMAL VARIABLES MEASUREMENT;
THERMODYNAMIC PROPERTIES;
THIN FILMS;
AC HOT STRIP METHOD;
TEMPERATURE OSCILLATIONS;
THERMAL DIFFUSIVITY;
DIELECTRIC FILMS;
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EID: 0031634290
PISSN: 00150193
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1080/00150199808014881 Document Type: Article |
Times cited : (6)
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References (4)
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