Spectroscopic determination of C2 densities in Ar/H2/CH4 and Ar/H2/C60 microwave plasmas for nanocrystalline diamond synthesis

Materials Research Society Symposium - Proceedings

Volumn 502, Issue , 1998, Pages 275-280

  Goyette, A N ^a   Lawler, J E ^a   Anderson, L W ^a   Gruen, D M ^a   McCauley, T G ^a   Zhou, D ^a   Krauss, A R ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMOND FILMS; GASES; MICROWAVES; NANOSTRUCTURED MATERIALS; PLASMA DENSITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SUBSTRATES;

MICROWAVE PLASMA; NANOCRYSTALLINE DIAMOND FILMS;

ABSORPTION SPECTROSCOPY;

EID: 0031633153     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)