Lattice sites and stability of implanted Er in FZ and CZ Si

Materials Research Society Symposium - Proceedings

Volumn 486, Issue , 1998, Pages 269-274

  Wahl, U ^a   Correia, J G ^a   Langouche, G ^a   Vantomme, A ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL GROWTH FROM MELT; CRYSTAL LATTICES; ERBIUM; ION IMPLANTATION; LATTICE CONSTANTS; SEMICONDUCTOR DOPING;

INTERSTITIAL SITES;

SEMICONDUCTING SILICON;

EID: 0031633141     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (17)