High-performance sub-0.25 μm CMOS technology with multiple thresholds and copper interconnects

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 1998, Pages 18-19

  Su, L ^a   Schulz, R ^a   Adkisson, J ^a   Beyer, K ^a   Biery, G ^a   Cote, W ^a   Crabbe, E ^a   Edelstein, D ^a   Ellis Monaghan, J ^a   Eld, E ^a   Foster, D ^a   Gehres, R ^a   Goldblatt, R ^a   Greco, N ^a   Guenther, C ^a  

^a IBM RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; ELECTRIC INVERTERS; MICROPROCESSOR CHIPS; RANDOM ACCESS STORAGE;

STATIC RANDOM ACCESS MEMORY (SRAM);

CMOS INTEGRATED CIRCUITS;

EID: 0031632790     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)