New prediction method for oxide lifetime and its application to study dielectric breakdown mechanism

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 1998, Pages 158-159

  Okada, Kenji ^a   Kubo, Hiroko ^a   Ishinaga, Atsushi ^a   Yoneda, Kenji ^a  

^a PANASONIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; DIELECTRIC PROPERTIES OF SOLIDS; ELECTRIC BREAKDOWN OF SOLIDS; INDUCED CURRENTS; LEAKAGE CURRENTS;

DIELECTRIC BREAKDOWN; STRESS INDUCED LEAKAGE CURRENTS (SILC);

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0031632483     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)