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Volumn , Issue , 1998, Pages 297-302
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Measurement and correlation of ion beam current density to moisture stability of oxide film stacks fabricated by cold cathode ion assisted deposition
a
a
Denton Vacuum
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(United States)
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Author keywords
[No Author keywords available]
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Indexed keywords
COLD CATHODE TUBES;
CURRENT DENSITY;
DEPOSITION;
DIELECTRIC FILMS;
ELECTRON ENERGY LEVELS;
ION BEAMS;
ION SOURCES;
OXYGEN;
REFRACTIVE INDEX;
THIN FILMS;
TITANIUM DIOXIDE;
ION BEAM ASSISTED DEPOSITION;
OPTICAL FILMS;
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EID: 0031632290
PISSN: 07375921
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (6)
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References (7)
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