Impurity diffusion in SiGe alloys: Strain and composition effects

Materials Research Society Symposium - Proceedings

Volumn 532, Issue , 1998, Pages 187-198

  Larsen, Arne Nylandsted ^a  

^a AARHUS UNIVERSITY   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EFFECTS; CRYSTAL IMPURITIES; DIFFUSION IN SOLIDS; EPITAXIAL GROWTH; STRAIN;

IMPURITY DIFFUSION;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0031630180     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-532-187     Document Type: Conference Paper

References (24)