Stress evolution in sputtered fcc metal multilayers

Materials Research Society Symposium - Proceedings

Volumn 505, Issue , 1998, Pages 589-593

  Ramaswamy, Vidya ^a   Nix, William D ^a   Clemens, Bruce M ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSIVE STRESS; COMPUTER SIMULATION; COPPER; FILM GROWTH; LASER BEAMS; PALLADIUM; PLATINUM; STRESS ANALYSIS; SUBSTRATES; TENSILE STRESS; TEXTURES; X RAY DIFFRACTION ANALYSIS;

ATOMIC PEENING; METAL MULTILAYERS;

METALLIC SUPERLATTICES;

EID: 0031629668     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)